@conference {Voges_EBT_2006, title = {The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities}, booktitle = {Proceedings of the 8th International Conference on Electron Beam Technologies}, year = {2006}, pages = {46{\textendash}50}, publisher = {Bulgarian Academy of Sciencies}, organization = {Bulgarian Academy of Sciencies}, address = {Varna}, author = {Kathrin Voges and Tim Welters and S. B{\"o}hm and Klaus Dilger}, editor = {Georgy Mladenov} }