@conference {Voges_EBT_2006,
	title = {The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities},
	booktitle = {Proceedings of the 8th International Conference on Electron Beam Technologies},
	year = {2006},
	pages = {46{\textendash}50},
	publisher = {Bulgarian Academy of Sciencies},
	organization = {Bulgarian Academy of Sciencies},
	address = {Varna},
	author = {Kathrin Voges and Tim Welters and S. B{\"o}hm and Klaus Dilger},
	editor = {Georgy Mladenov}