@article {Dilthey_MT_2004,
	title = {Assembly of hybrid micro-systems -{\textendash} the SFB 440},
	journal = {Microsystem Technologies},
	volume = {10},
	year = {2004},
	pages = {247{\textendash}251},
	publisher = {Springer-Verlag},
	issn = {1432-1858},
	doi = {10.1007/s00542-003-0366-z},
	author = {U. Dilthey and A. Brandenburg and G. Smolka}
}