Planar Heating Element Adjusted by Electron Beam Micromachining

NadpisPlanar Heating Element Adjusted by Electron Beam Micromachining
Publication TypeConference Paper
Year of Publication2009
AuthorsDupák, L. - Dupák, J.
Secondary AuthorsMladenov, G.
Conference NameProceedings of the 9th International Conference on Electron Beam Technologies
PublisherBulgarian Academy of Sciencies
Conference LocationVarna