Micro electron beam welding and laser machining -– potentials of beam welding methods in the micro-system technology

NadpisMicro electron beam welding and laser machining -– potentials of beam welding methods in the micro-system technology
Publication TypeJournal Article
Year of Publication2004
AuthorsSmolka, G. - Gillner, A. - Bosse, L. - Lützeler, R.
JournalMicrosystem Technologies
Volume10
Pagination187–192
ISSN1432-1858
DOIDOI 10.1007/s00542-003-0347-2