%0 Conference Paper
%B Proceedings of the 9th International Conference on Electron Beam Technologies
%D 2009
%T Planar Heating Element Adjusted by Electron Beam Micromachining
%A Dupak, L.
%A Dupák, Jan
%E Georgy Mladenov
%C Varna
%I Bulgarian Academy of Sciencies
%P 82–84