%0 Journal Article
%J Microsystem Technologies
%D 2004
%T Micro electron beam welding and laser machining -– potentials of beam welding methods in the micro-system technology
%A G. Smolka
%A A. Gillner
%A L. Bosse
%A R. Lützeler
%I Springer-Verlag
%P 187–192
%R DOI 10.1007/s00542-003-0347-2
%V 10