The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities

NadpisThe Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities
Publication TypeConference Paper
Year of Publication2006
AuthorsVoges, K. - Welters, T. - Böhm, S. - Dilger, K.
Secondary AuthorsMladenov, G.
Conference NameProceedings of the 8th International Conference on Electron Beam Technologies
PublisherBulgarian Academy of Sciencies
Conference LocationVarna