Nadpis | The Application of Monte-Carlo Methods to Electron-Beam Interactions with Solids for the Prediction of Micromachining Capabilities |
Publication Type | Conference Paper |
Year of Publication | 2006 |
Authors | Voges, K. - Welters, T. - Böhm, S. - Dilger, K. |
Secondary Authors | Mladenov, G. |
Conference Name | Proceedings of the 8th International Conference on Electron Beam Technologies |
Publisher | Bulgarian Academy of Sciencies |
Conference Location | Varna |